JPS6048104U - 光学式表面変位検出装置 - Google Patents

光学式表面変位検出装置

Info

Publication number
JPS6048104U
JPS6048104U JP13970883U JP13970883U JPS6048104U JP S6048104 U JPS6048104 U JP S6048104U JP 13970883 U JP13970883 U JP 13970883U JP 13970883 U JP13970883 U JP 13970883U JP S6048104 U JPS6048104 U JP S6048104U
Authority
JP
Japan
Prior art keywords
reflected light
detection element
slit
detecting
collimator lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13970883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318887Y2 (en]
Inventor
岡田　淳平
義治 桑原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP13970883U priority Critical patent/JPS6048104U/ja
Publication of JPS6048104U publication Critical patent/JPS6048104U/ja
Application granted granted Critical
Publication of JPH0318887Y2 publication Critical patent/JPH0318887Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13970883U 1983-09-09 1983-09-09 光学式表面変位検出装置 Granted JPS6048104U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13970883U JPS6048104U (ja) 1983-09-09 1983-09-09 光学式表面変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13970883U JPS6048104U (ja) 1983-09-09 1983-09-09 光学式表面変位検出装置

Publications (2)

Publication Number Publication Date
JPS6048104U true JPS6048104U (ja) 1985-04-04
JPH0318887Y2 JPH0318887Y2 (en]) 1991-04-22

Family

ID=30313044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13970883U Granted JPS6048104U (ja) 1983-09-09 1983-09-09 光学式表面変位検出装置

Country Status (1)

Country Link
JP (1) JPS6048104U (en])

Also Published As

Publication number Publication date
JPH0318887Y2 (en]) 1991-04-22

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